‧為什麼客戶會選擇 Rorze ?!
1.超潔淨robot的領先者
Rorze Robot Concept -Cleanliness-
Rorze clean robot 是世界上首具晶圓搬送時無微塵顆粒的晶圓搬送robot (in 1986)
‧Magnetic sealed to all axes
‧Edge-clamp mechanism also sealed by
magnetic (ferrofluidic) seal.
‧Skirt-type body to prevent escape of
particles
‧Class 1
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2.No.1 Cleanliness
‧ Rorze Real Clean System
Wafer handling area is completely sealed by “Pressure Isolation board”.
No factor of particle generation at wafer handling area
3.No.1 Reliability
RR701 Robot MTBF More than 15 years MTBF install basis
4.No.1 Accuracy
RR701 Robot MTBF More than 15 years MTBF install basis
‧Rorze robot concept for Accuracy
Accuracy
用3 Ball Screw的優點
(Arm移動時的robot傾斜度比較)
‧Rorze robot concept for Accuracy
Accuracy
◆ EFEM transfer accuracy： ±0.2mm（X-Y）
◆ With 3 ball screws(120°layout),
4 times higher stiffness for improved accuracy for horizontal direction
(important for wafer positioning)
5. 無需維護的系統
‧Maintainance Free system
‧W/ reliable robots, loadports.
‧Achived very low COO;
Robot : maintainance free
(recommend 5 yr.Refurbishment/OH)
‧Consumable parts; pads on
end-effector only/ 5 yr.
(spare parts consumption:
<$500 / 5yr. Average)
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6. 自行設計的軟體
人性化操作介面
觸控面板
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