ALP -主動式晶圓載具裝置

產品概述

ALP（Active Load Port）為新一代主動式 FOUP 載台，可與現有 EFEM/Load Port 設備完全相容，無需更動既有 OHT（Overhead Transport）線路。其設計核心在於提升操作員可及性、簡化 FOUP 搬送流程，並在不大幅改造機台的前提下，大幅提高搬送效率與維護便利性。

核心功能與機構設計

◎ 單手臂主動搬送機構

• 緩衝埠（Buffer Port）搭載一支專用手臂，可直接將 FOUP 由 Buffer 搬送至 Load Port
• 手臂採 搖動式結構（Simple Z-axis + Tilting），具備升降與搖動功能
• 透過抓握 FOUP 頂部自動凸緣（Top Flange Gripping），可穩定將 FOUP 精準定位至 LP

◎完全相容既有EFEM／LP架構

• 可直接安裝於現有 EFEM 上
• 無需更換 OHT 系統或現有 OHT 路線
• 緩衝埠可無縫整合至既有布局中

提升操作便利性

◎操作員可直接存取 FOUP

• 透過 ALP 的簡易手臂動作，確保操作員擁有良好、明確的操作空間
• 有助於維護、安全取放、換線操作等人工作業

◎ 最小改造即可整合

• 僅需增加新的 OHT 校正點位
• 調整 E84 與 Buffer Port 的連接方式
• 機台側邊 完全不需改造，降低導入成本與停機時間

整合亮點

◎ 不影響既有 OHT 系統

◎ FOUP 從 Buffer 到 Load Port 的路徑更短、更穩定

◎ 升降＋搖動的手臂結構讓定位更精準

◎ 提升 EFEM 的整體搬送效率與實務可用性

◎ 維持機台現有設計，不需額外開孔或調整側板

Product Overview

The ALP (Active Load Port) is a next-generation active FOUP platform designed to be fully compatible with existing EFEM / Load Port systems without requiring modifications to the current OHT (Overhead Transport) line configuration.

The core design objective is to improve operator accessibility, simplify FOUP transfer processes, and significantly enhance transfer efficiency and maintenance convenience without major equipment modification.

Core Functions & Mechanical Design

◎ Single-Arm Active Transfer Mechanism

• The Buffer Port is equipped with a dedicated transfer arm that directly moves the FOUP from the Buffer to the Load Port
• The arm adopts a simple structure (Simple Z-axis + Tilting), enabling vertical motion and tilting movement
• By gripping the FOUP top flange (Top Flange Gripping), the system ensures stable and precise positioning of the FOUP onto the Load Port

◎ Full Compatibility with Existing EFEM / Load Port Architecture

• Can be directly installed on existing EFEM systems
• No replacement of the OHT system or modification of existing OHT routing required
• Buffer Port can be seamlessly integrated into the current layout

Enhanced Operational Convenience

◎ Direct Operator Access to FOUP

• The simple arm movement of ALP ensures clear and accessible working space for operators
• Supports maintenance, safe FOUP handling, and process changeover operations

◎ Minimal Modification for Integration

• Only new OHT calibration points are required
• Adjustment of E84 and Buffer Port connection configuration
• No modification required on the equipment side panel, reducing installation cost and downtime

Integration Highlights

• No impact on existing OHT system
• Shorter and more stable transfer path from Buffer to Load Port
• Vertical lift + tilting arm structure enables precise positioning
• Improved overall EFEM transfer efficiency and operational usability
• Maintains existing equipment structure without additional openings or side panel modification