FWBS

FRAME WAFER STOCKER with N2 PLATE Function

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• Specialized auto frame load port and clean robot designed by RORZE team.
• Using the spin application inside the stock to make the maximum on space and N2 air function on both pod bottom.
• Inside the stocker to make the environment keep an efficient humidity, oxygen and prevent from particle contamination in order to perform high performance and high efficiency auto transfer stock job.
• N2 plate, it uses independent control nuzzle and in-time display for inlet air flow, humidity and temperature. It makes users to easily monitor each value‘s change.
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• Video