ALP - Active Load Port

• Current EFEM/LP Can Be Used
• Buffer Port Has Arm To Transfer The FOUP To The LP
• Swing Type Arm - 2 Axes - Up/Down+Swing
• Arm Transfers FOUP To The LP By Gripping The Top Robotic Handling Flanges To LP

• No Need To Change The Current OHT Line
• Alps Serve As Buffer Ports For OHT On Both Sides Of The LP
• Equipped In The EFEM

• Operator Can Access The FOUP
• Operator Can Secure The Access Space By Simply Moving The Arm

• Least modification For Tool and OHT
• Add New Teaching Point Of OHT For Buffer Port
• Change E84 Line Connection To Buffer Port
• No Modification On Tool Side